Product Introduction
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The Metal Capacitive Diaphragm Gauge High Precision Vacuum Sensor offers precise reading accuracy and resolution, playing a critical role in process control for low vacuum pressure measurement scenarios within industries such as semiconductor, photovoltaic, and industrial markets.
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This Metal Capacitive Diaphragm Gauge features a direct measurement design and all-media-wetted components made entirely from nickel-based alloy. It is suitable for handling corrosive media in semiconductor processes.
Features
Superior Measurement Accuracy
Utilizes advanced capacitive sensing technology to deliver ±0.2% FS precision, ensuring reliable data for critical vacuum processes and quality control.
01
Robust Process Compatibility
Constructed with full nickel-alloy materials and welded hermetic structure, providing exceptional corrosion resistance and leak-tight performance in aggressive media environments.
02
Multiple Range Options
The gauge offers a selection of measurement ranges (0–1/10/100/1000 Torr), ideally suited for applications spanning from rough to medium vacuum.
03
High Overload Resistance
Utilizing metal diaphragm tensioning technology, the gauge can withstand overloads of 200% to 300% of atmospheric pressure based on customer requirements, providing a high safety margin in applications prone to pressure surges.
04
Specifications
| Pressure Range | 0～1Torr/10Torr/100Torr/1000Torr |
| Packaging Form | Diaphragm Isolated Package |
| Measurement Medium | Gases compatible with Nickel-based alloy |
| Storage Temperature | -40℃～85℃ |
| Medium Temperature | -20℃～80℃ |
| Calibration Temperature | 0～50℃ |
| Power Supply | 15V~30 VDC |
| Output Signal | 0～10V DC,0V～5V DC, 1V～5V DC |
| Measurement Accuracy | 0.2%FS,0.5%FS,±1%FS |
| Temperature Effect | 0.05%FS/℃ |
| Pressure Connection | KF16, VCR, Others on request |
| Electrical Connection | D-Sub 9/15, Terminal Block, Others on request |
Application
Semiconductor Manufacturing
The Metal Capacitive Diaphragm Gauge High Precision Vacuum Sensor provides critical process monitoring in thin film deposition, etching systems, and lithography equipment. Its high accuracy ensures precise vacuum control during wafer processing.
Energy Technology Systems
This Diaphragm vacuum gauge enables reliable measurement in fuel cell testing, solar panel manufacturing, and battery production processes. Its corrosion-resistant construction withstands exposure to various process gases, delivering consistent performance in energy research and development applications.
Scientific Research Laboratories
Ideal for analytical instrumentation, surface science studies, and experimental physics setups requiring stable vacuum conditions. The Vacuum gauge's wide measurement range and temperature stability support diverse research applications from material science to fundamental physics experiments.
Food & Medical Industries
Used in freeze-drying equipment, sterilization systems, and medical device packaging lines where precise vacuum control is essential. The hermetically sealed design and full nickel-alloy construction ensure compliance with hygienic standards and resistance to sterilization processes.
Outline Dimensions
Unit: mm
Installation & Operation Tips
1. Proper Installation
Always use clean gloves when handling the vacuum gauge to prevent membrane contamination. Ensure the flange connection is properly aligned and evenly tightened to avoid mechanical stress on the sensing element.
2. Operational Precautions
Allow the capacitive diaphragm vacuum gauge to stabilize to ambient temperature before powering on. Avoid sudden pressure shocks exceeding 200% of full scale, and always maintain pressure within the calibrated range for accurate measurements.
3. Calibration & Maintenance
Perform zero-point calibration every 12 months under stable vacuum conditions.
4. Environmental Requirements
Prevent condensation formation by maintaining operating temperature above dew point. Install protective screens when measuring in particle-rich environments to extend sensor lifespan. for Capacitive Diaphragm Vacuum Gauge.
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