Silicon Resonant Pressure Sensor

Silicon Resonant Pressure Sensor

Details
Up to ±0.01% FS Accuracy • Long-Term Stability • Frequency Output (TTL) • Aerospace-Grade Reliability
📊 Range: 5-500kPa (Absolute)
📡 Output: Frequency (TTL) 35-45kHz
🌡️ Temp: -55°C ~ +125°C
📉 Stability: ±0.01% FS (Enhanced)
Category
Pressure Transmitter
 
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Description
Technical Parameters

Product Overview

  • The silicon resonant pressure sensor is one of the most accurate pressure measurement devices available, engineered for applications where precision and long-term stability are non-negotiable. Its core is a resonant pressure chip with a tuning-fork beam structure that operates in in-plane vibration mode, using electrostatic excitation and capacitive detection to precisely capture resonant frequency. A closed-loop control circuit converts pressure directly into a frequency signal-eliminating the analog error sources inherent in conventional sensors. With absolute ranges from 5kPa to 500kPa and accuracy down to ±0.01% FS, it is the sensor of choice for aerospace air data computers, precision barometry, and pressure calibration standards.

Product Advantages

Unmatched Accuracy: ±0.01% FS accuracy grade rivals the best laboratory pressure standards, enabling precision applications that piezoresistive or capacitive sensors cannot address.

Frequency-Domain Immunity: Pressure is encoded in frequency, not voltage amplitude. This inherently rejects electrical noise, cable resistance effects, and long-term analog drift.

Long-Term Stability: Enhanced-grade stability of ±0.01% FS dramatically reduces recalibration costs and maintains measurement integrity over years of service.

Direct Digital Compatibility: TTL square-wave output connects directly to digital counters, timers, and microcontrollers-no ADC, no signal conditioning, no calibration coefficients to manage.

Acceleration Insensitivity: <5Pa/g acceleration influence ensures accurate readings even in vibrating aerospace and mobile platforms.

Extreme Temperature Range: Operates from -55°C to +125°C, with multiple compensation profiles to suit application-specific thermal environments.

Aerospace Heritage: Resonant pressure sensing is the established technology for air data computers, altitude measurement, and flight-critical pressure monitoring.

Specifications

product-895-1203

 

Application

The silicon resonant pressure sensor is the core sensing element in applications where pressure accuracy directly affects safety, performance, or measurement validity. In aerospace air data systems, it measures altitude, airspeed, and cabin pressure with unmatched precision. In meteorology and calibration, it serves as a transfer standard and barometric reference. Its frequency output and aerospace-grade stability make it indispensable for flight-critical and laboratory-grade pressure measurement.

 

 

 

Aerospace air data computers

 

Flight test instrumentation

 

 

Barometric altitude & pressure measurement

 

 

 

Ground pressure controllers (pressure reference)

 

 

Meteorological observation systems

 

 

Spacecraft & rocket control systems

 

 

Precision pressure calibration standards

 

 

Jet engine pressure monitoring

External dimension

product-895-327

🔌Electrical Connection

product-1083-628

FAQ

Q: Why is frequency output better than analog voltage or current output?

A: Frequency output encodes the measurement in the timing of pulses rather than in a voltage or current level. This makes it immune to cable resistance, electrical noise, temperature-induced offset drift, and long-term aging of analog components. Frequency signals can be transmitted over long distances without degradation and can be read directly by digital counters or microcontrollers without an ADC.

Q: What temperature compensation options are available?

A: Multiple compensation ranges are available: -10°C to +50°C, -20°C to +70°C, -40°C to +80°C, -40°C to +125°C, -55°C to +85°C, -55°C to +100°C, and -55°C to +125°C. Select the range that covers your application's thermal environment for optimal accuracy.

Q: What accuracy grades are available?

A: The sensor is available in ±0.01% FS, ±0.02% FS, and ±0.03% FS accuracy grades. Long-term stability is ±0.01% FS for the enhanced grade and ±0.02% FS for the standard grade. These specifications are among the highest available for any pressure sensing technology.

 

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