Based on their operating principles, pressure sensors can be categorized into several types, including ceramic capacitive, metal capacitive, thin-film strain gauge, strain gauge, silicon piezoresistive, silicon capacitive, and silicon resonant types. Among these, resonant pressure sensors offer the highest accuracy, achieving precision up to 0.01% FS across the full temperature range (-40°C to 85°C). Due to their exceptional accuracy, they are widely used in applications requiring extremely high pressure precision, such as ocean depth measurement, pressure reference standards, aircraft flight parameter measurement, and meteorological monitoring. The reasons why silicon resonant pressure sensors achieve such high-precision pressure measurement are as follows:
1. The core structure of a silicon resonant pressure sensor is a symmetrical double-clamped silicon resonator. The resonant frequency of the resonator changes with applied pressure. As frequency is an intrinsic property of solids, it is less susceptible to low-frequency noise and exhibits minimal variation with temperature. This natural filtering effect results in a high signal-to-noise ratio.
2. The double-clamped resonator structure ensures that when the resonator vibrates, the net external force is zero. Additionally, due to the use of MEMS anodic bonding technology, the entire resonator operates in a vacuum environment, achieving a high quality factor.
3. During the design process, stress-relief structures are incorporated at the thermally sensitive areas of the resonator to minimize thermal stress. This significantly reduces the thermal stress on the resonator.
Xi'an Mihui Technology's silicon resonant pressure sensor products achieve high-precision pressure measurement with an accuracy of 0.01% FS across the full temperature range. They offer unparalleled annual stability of 0.01% FS and support both frequency output and RS485 digital output. These sensors cover absolute pressure measurements from 100 kPa to 1 MPa. The specifications are as follows:
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