Vacuum measurement technology is a critical component of vacuum science and technology, with increasing demands in both defense and civilian sectors. Accurately measuring vacuum pressure is particularly important. Vacuum gauges are widely used in industrial manufacturing, semiconductor equipment, nuclear industry, and other fields. Globally renowned vacuum gauge manufacturers include MKS Instruments and INFICON. There are two common types of vacuum gauges based on their operating principles: one is the metal capacitance vacuum gauge, represented by MKS' technical approach, and the other is the ceramic capacitance vacuum gauge, represented by INFICON's technical approach. Generally, metal capacitance vacuum gauges offer better performance than ceramic capacitance models, making them more widely adopted.
The sensing element of a metal capacitance vacuum gauge consists of a capacitive structure formed by a metal diaphragm approximately 40 μm thick and a ceramic electrode. As shown in the figures above, the metal diaphragm is stretched with a large tension force before being welded, creating a structure capable of withstanding overload pressures up to hundreds of times the rated range. When vacuum pressure is applied to the diaphragm, it deforms, altering the capacitance between the metal diaphragm electrode and the ceramic electrode. By measuring this capacitance change and calibrating it against standard vacuum pressure references, the absolute vacuum value can be determined. To improve measurement accuracy, a getter is placed inside the cavity.
Xi'an Mihui Technology Co., Ltd. has independently developed the VG750 vacuum gauge, achieving performance comparable to MKS and INFICON products. It covers a measurement range from 1 Torr to 1000 Torr and has been widely adopted in batch applications within the semiconductor and nuclear industries. Its performance specifications are listed in the table below. Interested parties are welcome to contact us for trial use.
For more information, please visit our website: mihuitec.com, or check out the product page: China VG750 Metal Capacitive Diaphragm Gauge Manufacturers Suppliers Factory - Quotation - Mihui Tech.
